Kinetics of Molecular Beam Epitaxy: Effect of Ion-Induced Sputtering
نویسندگان
چکیده
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A brief introduction to the MBE technique is presented with main attention to the elemental source MBE. A discussion on the effusion cell as beam source is shortly given starting from ideal cases to real cells homogeneity problems. A short review regarding the thermodynamic approach to the MBE is pointed out. Focusing on the possibility that, despite the fact that MBE processes occur under stro...
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ژورنال
عنوان ژورنال: MRS Proceedings
سال: 1990
ISSN: 0272-9172,1946-4274
DOI: 10.1557/proc-202-353